

ISCM868S automatic material handling cleaning system
Feature
●Equipped with dual nozzles to spray atomized deionized water to clean the substrate
●Programmable swing spray arm movement and rotary table rotation mode
●High-speed centrifugal drying
●Can be connected with ASM's AOI system and lens holder fixing system
Size
Width, depth and height
1,960 x 1,560 x 2,300 mm³